TY - CONF T1 - Comparison of transmission electron microscopy mehods to measure layer thicknesses to sub-monolyer precision CY - Berlin PY - 2008/01/01 AU - Walther T ED - Richter S ED - Schwedt A PB - Springer SN - 978-3-540-85225-4 VL - 2 (Materials Science) SP - 377 EP - 378 Y2 - 2025/05/18 ER -