TY - JOUR T1 - Co-Clustering Via Nanochannel-Membrane Modulated Ion Implantation into Si3N4 Observed By Plan-View Aberration-Corrected STEM And EELS JO - Microscopy and Microanalysis PY - 2012/01/01 AU - Guan W AU - Bhatta U AU - Ross IM AU - Ghatak J AU - Moebus G AU - Peng N ED - DO - DOI: 10.1017/s1431927612003765 PB - Cambridge University Press (CUP) VL - 18 IS - S2 SP - 382 EP - 383 Y2 - 2025/05/22 ER -