TY - JOUR
T1 - A Mass Spectral Investigation of the RF Plasmas of Small Organic Compounds: An Investigation of the Plasma-Phase Reactions in the Plasma Deposition from Allyl Amine
JO - Plasmas and Polymers
UR - http://dx.doi.org/10.1023/b:papo.0000005941.22674.75
PY - 1998/01/01
AU - Beck AJ
AU - Candan S
AU - France RM
AU - Jones FR
AU - Short RD
ED -
DO - DOI: 10.1023/b:papo.0000005941.22674.75
PB - Springer Science and Business Media LLC
VL - 3
IS - 2
SP - 97
EP - 114
Y2 - 2025/05/23
ER -