TY - JOUR
T1 - Fabrication of Photonic Crystal Structures on GaAs by Single Pulse Laser Interference Lithography
JO - Journal of Laser Micro/Nanoengineering
UR - http://dx.doi.org/10.2961/jlmn.2024.02.2007
PY - 2024/09/01
AU -
ED -
DO - DOI: 10.2961/jlmn.2024.02.2007
PB - Japan Laser Processing Society
Y2 - 2025/06/21
ER -