@inbook{inbook, title = {{3D determination of a MOSFET gate morphology by FIB tomography}},
url = {{}},
year = {{2018}},
month = {{1}},
author = {{Inkson BJ and Olsen S and Norris DJ and O艍eill AG and Mobus G}},
doi = {{10.1201/9781351074636}},
isbn = {{9781315895536}},
pages = {{611-616}},
note = {{Accessed on 2025/07/04}}}