TY  - JOUR

T1  - The effect of ion-beam specimen preparation techniques on vacancy-type defects in silicon

JO  - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

PY  - 2006/01/01

AU  - Gandy AS

AU  - Donnelly SE

AU  - Beaufort M-F

AU  - Vishnyakov VM

AU  - Barbot J-F

ED  - 

DO  - DOI: 10.1016/j.nimb.2005.08.097

PB  - Elsevier BV

VL  - 242

IS  - 1-2

SP  - 610

EP  - 613

Y2  - 2025/04/30

ER  -