@inproceedings{inproceedings, title = {{The chemistry of thin film deposits formed from hexamethyldisiloxane and hexamethyldisilazane plasmas}}, publisher = {{WORLD SCIENTIFIC}}, url = {{http://dx.doi.org/10.1142/9789814503914_0031 }}, year = {{2014}}, month = {{1}}, author = {{Bushnell-Watson SM and Alexander MR and Ameen AP and Rainforth WM and Short RD and Jones FR and Michaeli W and Stollenwerk M and Mathar G and Zabold J}}, doi = {{10.1142/9789814503914_0031}}, journal = {{The Mechanics of Thin Film Coatings}}, note = {{Accessed on 2025/06/28}}}