TY - CONF T1 - Reduction of dark current and unintentional background doping in InGaAsN photodetectors by ex situ annealing JO - Proceedings of SPIE - The International Society for Optical Engineering PY - 2010/01/01 AU - Tan SL AU - Tan LJJ AU - Goh YL AU - Zhang S AU - Ng JS AU - David JPR AU - Marko IP AU - Allam J AU - Sweeney SJ AU - Adams AR ED - DO - DOI: 10.1117/12.853912 SN - 9780819481993 VL - 7726 Y2 - 2025/06/26 ER -