@inproceedings{inproceedings, title = {{Device quality SiO2 films by liquid phase deposition (LPD) at 48掳C}}, url = {{}}, year = {{2011}}, month = {{2}}, author = {{Manhas M and Pease TJ and Cross R and Bose SC and Oxley DP and De Souza MM and Sankara Narayanan EM}}, doi = {{10.1557/proc-716-b7.9}}, volume = {{716}}, journal = {{Materials Research Society Symposium - Proceedings}}, pages = {{317-323}}, note = {{Accessed on 2025/07/03}}}