@inproceedings{inproceedings, title = {{A photolithographic process for grossly non-planar substrates - art. no. 69212E}}, url = {{}}, year = {{2008}}, month = {{1}}, author = {{Williams GL and McWilliam RP and Toriz-Garcia J and Curry R and Maiden A and Seed NL and Purvis A and Ivey PA}}, volume = {{6921}}, journal = {{EMERGING LITHOGRAPHIC TECHNOLOGIES XII, PTS 1 AND 2}}, pages = {{E9212-E9212}}, note = {{Accessed on 2025/06/23}}}