TY - JOUR T1 - Quantum-interferometric optical lithography: Towards arbitrary two-dimensional patterns JO - Physical Review A. Atomic, Molecular, and Optical Physics PY - 2001/06/01 AU - Kok P AU - Boto AN AU - Abrams DS AU - Williams CP AU - Braunstein SL AU - Dowling JP ED - VL - 63 IS - 6 Y2 - 2025/05/21 ER -