@article{article, title = {{New perspectives on nano-engineering by secondary electron spectroscopy in the helium ion and scanning electron microscope}}, publisher = {{Cambridge University Press (CUP)}}, url = {{http://eprints.whiterose.ac.uk/127985/ }}, year = {{2018}}, month = {{4}}, author = {{Stehling NA and Masters R and Zhou Y and O'Connell R and Holland C and Zhang H and Rodenburg C}}, doi = {{10.1557/mrc.2018.75}}, journal = {{MRS Communications}}, note = {{Accessed on 2025/07/03}}}