TY - CONF T1 - Application of spatially resolved electron energy-loss spectroscopy to the quantitative analysis of semiconducting layer structures JO - MICROSCOPY OF SEMICONDUCTING MATERIALS 1999, PROCEEDINGS PY - 1999/01/01 AU - Walther T AU - Mader W ED - Cullis AG ED - Beanland R IS - 164 SP - 121 EP - 128 Y2 - 2025/05/21 ER -