@article{article, title = {{Substrate ion etching in combined steered cathodic arc-UBM deposition system: Effects on interface architecture, adhesion, and tool performance}}, url = {{}}, year = {{2000}}, month = {{1}}, author = {{Schonjahn C and Lewis DB and Munz WD and Petrov I}}, volume = {{16}}, journal = {{SURFACE ENG}}, issue = {{2}}, pages = {{176-180}}, note = {{Accessed on 2025/05/18}}}