@article{article, title = {{The Snomipede: A parallel platform for scanning near-field photolithography}}, url = {{}}, year = {{2011}}, month = {{12}}, author = {{ul-Haq E and Liu Z and Zhang Y and Ahmad SAA and Wong LS and Hobbs JK and Leggett GJ and Micklefield J and Roberts CJ and Weaver JMR}}, doi = {{10.1557/jmr.2011.370}}, volume = {{26}}, journal = {{JOURNAL OF MATERIALS RESEARCH}}, issue = {{24}}, pages = {{2997-3008}}, note = {{Accessed on 2025/05/18}}}