TY - JOUR T1 - A systematic approach for precision electrostatic mode tuning of a MEMS gyroscope JO - Journal of Micromechanics and Microengineering PY - 2014/10/29 AU - Hu ZX AU - Gallacher BJ AU - Burdess JS AU - Bowles SR AU - Grigg HTD ED - DO - DOI: 10.1088/0960-1317/24/12/125003 PB - IOP Publishing VL - 24 IS - 12 SP - 125003 EP - 125003 Y2 - 2025/06/21 ER -