@inproceedings{inproceedings, title = {{Analysis Of Phosphorus Diffusion In the Polysilicon/Oxide/Silicon System Under Oxidizing Conditions For Profile Simulation}}, url = {{}}, year = {{1998}}, month = {{11}}, author = {{Gaiseanu F and Tsoukalas D and Tsamis C and Stoemenos J and Dimitriadis CA and Vasilaki E}}, note = {{Accessed on 2025/06/24}}}