TY - CONF T1 - Nanoscale 3D chemical mapping by spectroscopic electron tomography JO - SPATIALLY RESOLVED CHARACTERIZATION OF LOCAL PHENOMENA IN MATERIALS AND NANOSTRUCTURES PY - 2003/01/01 AU - Mobus G AU - Doole RC AU - Inkson BJ ED - Piqueras J ED - Zypman FR ED - Bonnell DA ED - Shreve AP VL - 738 SP - 15 EP - 20 Y2 - 2025/06/24 ER -