TY - JOUR
T1 - Defect growth in multilayer chromium nitride/niobium nitride coatings produced by combined high power impulse magnetron sputtering and unbalance magnetron sputtering technique
JO - Thin Solid Films
UR - http://dx.doi.org/10.1016/j.tsf.2017.06.027
PY - 2017/08/31
AU - Biswas B
AU - Purandare Y
AU - Sugumaran AA
AU - Loch DAL
AU - Creasey S
AU - Khan I
AU - Ehiasarian AP
AU - Hovsepian PE
ED -
DO - DOI: 10.1016/j.tsf.2017.06.027
PB - Elsevier BV
VL - 636
SP - 558
EP - 566
Y2 - 2025/07/05
ER -