@inproceedings{inproceedings, title = {{Effects of 鈥減rocessing parameters鈥� in plasma deposition: Acrylic acid revisited}}, publisher = {{American Vacuum Society}}, url = {{http://dx.doi.org/10.1116/1.581288 }}, year = {{1998}}, month = {{12}}, author = {{Candan S and Beck AJ and O鈥橳oole L and Short RD}}, doi = {{10.1116/1.581288}}, volume = {{16}}, journal = {{Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films}}, issue = {{3}}, pages = {{1702-1709}}, note = {{Accessed on 2025/07/04}}}