@article{article, title = {{High resolution quantitative two-dimensional dopant mapping using energy-filtered secondary electron imaging}}, url = {{}}, year = {{2006}}, month = {{9}}, author = {{Kazemian P and Mentink SAM and Rodenburg C and Humphreys CJ}}, doi = {{10.1063/1.2335980}}, volume = {{100}}, journal = {{J APPL PHYS}}, issue = {{5}}, note = {{Accessed on 2025/05/29}}}