@article{article, title = {{Plasma-surface interaction at sharp edges and corners during ion-assisted physical vapor deposition. Part I: Edge-related effects and their influence on coating morphology and composition}}, url = {{}}, year = {{2003}}, month = {{9}}, author = {{Macak EB and Munz WD and Rodenburg JM}}, doi = {{10.1063/1.1597755}}, volume = {{94}}, journal = {{J APPL PHYS}}, issue = {{5}}, pages = {{2829-2836}}, note = {{Accessed on 2025/05/25}}}